Backside metal patterning die singulation systems and related methods

ABSTRACT

Implementations of die singulation systems and related methods may include forming a plurality of die on a first side of a substrate, forming a seed layer on a second side of a substrate opposite the first side of the substrate, using a shadow mask, applying a mask layer over the seed layer, forming a backside metal layer over the seed layer, removing the mask layer, and singulating the plurality of die included in the substrate through removing substrate material in the die street and through removing seed layer material in the die street.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a continuation of the earlier U.S. patentapplication Ser. No. 17/082,579, entitled “Backside Metal Patterning DieSingulation Systems and Related Methods” to Seddon, filed Oct. 28, 2020,now pending, which application is a continuation of the earlier U.S.patent application Ser. No. 16/505,902, entitled “Backside MetalPatterning Die Singulation Systems and Related Methods” to Seddon, filedJul. 9, 2019, now issued as U.S. Pat. No. 10,825,725, which applicationclaimed the benefit of the filing date of U.S. Provisional PatentApplication 62/796,668, entitled “BACKSIDE METAL PATTERNING DIESINGULATION SYSTEMS AND RELATED METHODS” to Seddon, which was filed onJan. 25, 2019, the disclosures of each of which are hereby incorporatedentirely herein by reference.

BACKGROUND 1. Technical Field

Aspects of this document relate generally to die singulation systems andmethods. More specific implementations involve methods of singulatingsemiconductor die from a thinned substrate.

2. Background

Semiconductor devices include integrated circuits found in commonelectrical and electronic devices, such as phones, desktops, tablets,other computing devices, and other electronic devices. The devices areseparated through singulating a wafer of semiconducting material into aplurality of semiconductor die. Various layers may be coupled to thefront side and/or the backside of the wafer. Upon singulation, the diecan be mounted on a package and electrically integrated with the packagewhich may then be used in the electrical or electronic device.

SUMMARY

Implementations of die singulation systems and related methods mayinclude forming a plurality of die on a first side of a substrate,forming a seed layer on a second side of a substrate opposite the firstside of the substrate, using a shadow mask, applying a mask layer overthe seed layer, forming a backside metal layer over the seed layer,removing the mask layer, and singulating the plurality of die includedin the substrate through removing substrate material in the die streetand through removing seed layer material in the die street.

Implementations of die singulation systems and related methods mayinclude one, all, or any of the following:

The mask layer may include a polymer material.

The mask layer may include a photoresist material.

The seed layer may include titanium.

The backside metal layer may include copper.

Removing substrate material in the die street may include plasmaetching.

Removing substrate material in the die street and removing seed layermaterial in the die street may include using either a laser beam or asaw blade.

The method may include thinning the second side of the substrate to athickness less than 30 micrometers.

The method may include aligning the substrate from a backside of thesubstrate.

Implementations of die singulation systems and related methods mayinclude forming a plurality of die on a first side of a substrate,forming a seed layer on a second side of a substrate opposite the firstside of the substrate, using a shadow mask, applying a mask layer overthe seed layer, removing the shadow mask, forming a backside metal layerover the seed layer, removing the mask layer, and singulating theplurality of die included in the substrate through removing substratematerial in the die street and through removing seed layer material inthe die street using either a laser beam or a saw blade.

Implementations of die singulation systems and related methods mayinclude one, all, or any of the following:

The mask layer may include a resin material.

The mask layer may include a photoresist material.

The method may include remote plasma healing a sidewall of the diestreet.

The method may include thinning the second side of the substrate to athickness less than 30 micrometers.

The method may include aligning the substrate from a backside of thesubstrate.

Implementations of die singulation systems and related methods mayinclude forming a plurality of die on a first side of a substrate,forming a seed layer on a second side of a substrate opposite the firstside of the substrate, and using a shadow mask corresponding to diestreets of the substrate, forming a mask layer over the die streets ofthe substrate. The method may also include forming a backside metallayer over the seed layer between the mask layer, removing the masklayer from the die streets, and singulating the plurality of dieincluded in the substrate through removing substrate material in the diestreet and through removing seed layer material in the die street usingeither a laser beam or a saw blade.

Implementations of die singulation systems and related methods mayinclude one, all, or any of the following:

The mask layer may include a photoresist material.

The method may include remote plasma healing a sidewall of the die.

The backside metal layer may be 10 micrometers thick.

The mask layer may include a resin.

The foregoing and other aspects, features, and advantages will beapparent to those artisans of ordinary skill in the art from theDESCRIPTION and DRAWINGS, and from the CLAIMS.

BRIEF DESCRIPTION OF THE DRAWINGS

Implementations will hereinafter be described in conjunction with theappended drawings, where like designations denote like elements, and:

FIG. 1 is a cross sectional side view of a portion of a substrate;

FIG. 2 is a cross sectional side view of a plurality of layers coupledto a first side of the substrate of FIG. 1 ;

FIG. 3 is a view of the substrate and plurality of layers of FIG. 2 in aflipped orientation;

FIG. 4 is a view of the substrate and plurality of layers of FIG. 3 withthe substrate thinned;

FIG. 5 is a view of the substrate of FIG. 4 with a seed metal layercoupled thereto;

FIG. 6 is a top view of a portion of a substrate having a shadow maskpositioned over the substrate;

FIG. 7 is a cross-sectional side view of a mask layer formed over thesubstrate of FIG. 5 ;

FIG. 8 is a cross-sectional side view of a backside metal layer formedover the seed layer of FIG. 5 ;

FIG. 9 is a view of the substrate and seed layer of FIG. 8 with the masklayer removed;

FIG. 10 is a view of the substrate of FIG. 9 singulated into a pluralityof die;

FIG. 11 is a view of the plurality of die of FIG. 10 having smoothsidewalls;

FIG. 12 is a view of the substrate of FIG. 9 in a flipped orientationand with substrate material in the die street removed; and

FIG. 13 is a view of the substrate of FIG. 12 singulated into aplurality of die.

DESCRIPTION

This disclosure, its aspects and implementations, are not limited to thespecific components, assembly procedures or method elements disclosedherein. Many additional components, assembly procedures and/or methodelements known in the art consistent with the intended die singulationsystems and methods will become apparent for use with particularimplementations from this disclosure. Accordingly, for example, althoughparticular implementations are disclosed, such implementations andimplementing components may comprise any shape, size, style, type,model, version, measurement, concentration, material, quantity, methodelement, step, and/or the like as is known in the art for such diesingulation systems and methods, and implementing components andmethods, consistent with the intended operation and methods.

Referring to FIG. 1 , a cross sectional side view of a portion of asubstrate 2 is illustrated. The term “substrate” refers to asemiconductor substrate as a semiconductor substrate is a common type ofsubstrate, however, “substrate” is not an exclusive term that is used torefer to all semiconductor substrate types. Similarly, the term“substrate,” may refer to a wafer as a wafer is a common type ofsubstrate, however, “substrate” is not an exclusive term that is used torefer to all wafers. The various semiconductor substrate types disclosedin this document that may be utilized in various implementations may be,by non-limiting example, round, rounded, square, rectangular, or anyother closed shape. In various implementations, the substrate 2 mayinclude a substrate material such as, by non-limiting example, singlecrystal silicon, silicon dioxide, glass, gallium arsenide, sapphire,ruby, silicon-on-insulator, silicon carbide, polycrystalline oramorphous forms of any of the foregoing, and any other substratematerial useful for constructing semiconductor devices. In particularimplementations, the substrate may be a silicon-on-insulator substrate.

Referring to FIG. 2 , a cross sectional side view of a plurality oflayers coupled to a first side of the substrate of FIG. 1 isillustrated. In various implementations, before singulating a pluralityof die from the substrate 2, the method of forming a plurality of diemay include forming a plurality of die on the substrate. This mayinclude forming a plurality of layers 4 on a first side 6 the substrate2. As illustrated by FIG. 2 , the plurality of layers 4 may bepatterned, and in various implementations, may be patterned (orotherwise removed) to not be over a die street 8 in the substrate 2. Theplurality of layers may include, by non-limiting example, one or moremetal layers, one or more passivation layers, any other layer, and anycombination thereof. In various implementations passivation layers mayinclude, by non-limiting example, silicon nitride, oxides, metalelectrical test structures, electrical test pads, silicon dioxide,polyimides, metal pads, residual underbump metallization (UBM), anycombination thereof, and any other layer or material capable offacilitating electrical or thermal connection between the one or moresemiconductor die and/or protecting the one or more semiconductor diefrom contaminants. In various implementations, the plurality of die mayinclude power semiconductor devices, such as, by non-limiting example, aMOSFET, an IGBT, or any other power semiconductor device. In otherimplementations, the plurality of die may include non-powersemiconductor devices.

Referring to FIG. 3 , a view of the substrate and plurality of layers ofFIG. 2 in a flipped orientation is illustrated. The method of formingand singulating a plurality of die includes flipping the substrate and,though not illustrated, in various implementations, the method mayinclude applying a tape to a first side 10 of the plurality of layers 4.Such a tape may be a backgrind tape in various implementations.Referring to FIG. 4 , a view of substrate and plurality of layers ofFIG. 3 with the substrate thinned is illustrated. In variousimplementations, the method of forming and singulating a plurality ofdie may include thinning the second side 12 of the substrate 2. Invarious implementations, the substrate 2 may be thinned to a thicknessless than 50 micrometers (μm). In other implementations, the substrate 2may be thinned to a thickness less than 30 μm. In still otherimplementations, the substrate 2 may be thinned to a thickness less than100 μm, more than 100 μm, and in other various implementations, thesubstrate 2 may not be thinned. In particular implementations, thesubstrate 2 may be thinned to a thickness of about 25 μm, and in otherparticular implementations, the substrate may be thinned to a thicknessof about 75 μm. The substrate 2 may be thinned through backgrinding,etching, or any other thinning technique. In particular implementations,the substrate is thinned using a backgrinding process marketed under thetrade name TAIKO by DISCO of Tokyo, Japan to form an edge ring used tosupport the thinned wafer.

Referring to FIG. 5 , a view of the substrate of FIG. 4 with a seedmetal layer coupled thereto is illustrated. In various implementations,a method of singulating a plurality of die may include forming a seedlayer 14 on a second side 12 of a substrate 2 opposite the first side 16of the substrate. In particular implementations, the seed layer 14 maybe directly coupled to the second side 12 of the substrate 2. The seedlayer 14 may be applied to the substrate 2 using, by non-limitingexample, evaporating, electroplating, electroless plating, or anyanother method of metal deposition. In various implementations, the seedlayer may entirely coat the second side 12 of the substrate 2. In suchimplementations, the seed layer may provide electrical continuitythroughout the seed layer to facilitate electroplating of a backsidemetal layer to the seed layer 14 as disclosed later herein. In variousimplementations, the seed layer 14 may include an adhesion layer whichmay be directly coupled to the substrate 2. The adhesion layer mayinclude, by non-limiting example, titanium, tungsten, any other metal,any alloys thereof, and any combination thereof. The seed layer 14 mayalso include a layer over the adhesion layer which may include the samematerial as the backside metal layer configured to be coupled to theseed layer. In various implementations, the layer of the seed layer 14over the adhesion layer may include copper, any other metal, any alloythereof, and any combination thereof. In various implementations, theseed layer may be about 0.3 to about 0.5 μm thick, however, in otherimplementations the seed layer may be more or less than 1 μm thick.

Referring to FIG. 6 , a top view of a portion of a substrate having ashadow mask positioned over the substrate is illustrated. In variousimplementations, the method of singulating a plurality of die in asubstrate includes aligning a shadow mask 18 over the seed layer 14. Invarious implementations, the openings 20 in the shadow mask 18 may bealigned along the die streets 8 of the substrate 2. In variousimplementations, the method may include aligning the substrate from thefirst side (which may be the front side, or bottom side as oriented inFIG. 5 ) using optics or a camera. In such implementations, the opticsor camera may be placed below the substrate 2 and may detect a pluralityof alignment features formed on or within the substrate. In variousimplementations, the alignment features may be formed on or within thedie street 8 of the substrate 2. In implementations having tape coupledto the first side 10 of the plurality of layers 4, as illustrated byFIG. 5 , the optics or camera may be configured to detect the pluralityof alignment features through the tape. In a particular implementation,the substrate may be aligned using an infrared (IR) camera and IRalignment features. In other implementations, the substrate may bealigned from the backside, or second side 12 of the substrate 2. In suchimplementations, alignment features may be placed on the seed layer 14covering the substrate 2. Such features may be placed according tocorresponding alignment features on the opposing first side of thesubstrate. In other implementations where the substrate includes a ringaround the perimeter after thinning the substrate, the method ofaligning the substrate may include placing alignment features in theperiphery of the substrate and grinding down the perimeter/edge ring.The substrate 2 may then be aligned from the backside, or second side 12of the substrate by using the alignment features along the outer edge ofthe device. Such an alignment method may include using IR spectroscopy.In various implementations, the shadow mask 18 may be aligned by hand orby an alignment device depending on the amount of precision required.

Still referring to FIG. 6 , a single shadow mask may be used to patternthe mask layer over the seed layer. In such implementations, though notillustrated, a plurality of ties may be used to tie together the solidportions 22 of the shadow mask. The ties may be small enough to notmeaningfully interfere with the optical imaging of the mask layer. Inother implementations, though not illustrated, the shadow mask 18 mayinclude an upper plate with supports extending below to each solidportion 22 of the shadow mask. In such an implementation, a sprayercould follow the streets (or openings 20) of the shadow mask above theopenings 20 and below the upper plate while applying the mask layerthrough the openings. In other implementations, rather than a singleshadow mask, multiple shadow masks (or the same shadow mask used inmultiple orientations) may be used in applying the mask layer on theseed layer. Particular implementations may include applying the masklayer through a plurality of parallel slits of a mask. After applyingthe mask layer in a first direction, the shadow mask may then be rotatedninety degrees (or more or less than ninety degrees) and the mask layermay be applied over the seed layer in a second direction. Such animplementation may be used when the die singulated are rectangular orhave a quadrilateral shape. In a similar implementation, the shadow maskhaving the plurality of parallel slits may be rotated a second time andthe mask layer may be applied a third time or more times depending onthe number of edges of the die (as the die may be any polygonal closedshape). Such an implementation may be used when the die singulated aretriangular. In various implementations, the shadow mask is positionedabove the seed layer without physically contacting the seed layer. Inother implementations, the shadow mask may be a single piece ofoptically transmissive material that can project the shadow of the imageof the streets into material deposited on the substrate, causingactivation of the material exposed, which may then be removed through alithographic developing process.

Referring to FIG. 7 , a cross-sectional side view of a mask layer formedover the seed layer of FIG. 5 is illustrated. The method of singulatinga plurality of die includes applying a mask layer 24 over the seed layer14 using a shadow mask. The mask layer is applied over the die streets8. Because the mask layer 24 is applied over the die streets 8 using theshadow mask, the mask layer may correspond to the die streets with areasonable to high degree of accuracy. In turn, this may allow foraccurate deposition of the backside metal layer, as disclosed laterherein, and may also allow for more narrow die streets, resulting inmore die per substrate. In various implementations, the mask layer mayinclude a polymer or resin. The mask layer may also include aphotoresist material, however, because the mask layer may be alreadypatterned without the need to expose or develop the mask layer aphotoresist material not need to be used in the mask layer. Inimplementations where the backside metal layer is electroplated onto theseed layer, as disclosed later herein, the mask layer 24 may include anelectrically insulative material. In various implementations, the methodof singulating a plurality of die may include spraying the mask layer 24onto the seed layer 14 through the shadow mask. In otherimplementations, the method may include forcing the mask layer 24through the shadow mask and onto the seed layer 14 using a squeegee anda stencil. Upon applying the mask layer 24, the method of singulating aplurality of die may include removing the shadow mask.

Referring to FIG. 8 , a cross-sectional side view of a backside metallayer formed over the seed layer of FIG. 5 is illustrated. In variousimplementations, the method of singulating a plurality of die includesforming a backside metal layer 26 over the seed layer 14 and between theopenings in the mask layer 24. In particular implementations, the methodmay include electroplating the backside metal layer 26 over the seedlayer. The backside metal layer 26 may include copper, a copper alloy,any other metal, or any combination thereof. The backside metal layer 26may be about 10 μm thick, about 15 μm thick, more than 10 μm thick, orless than 15 μm thick.

Referring to FIG. 9 , a view of the substrate and seed layer of FIG. 8with the mask layer removed is illustrated. The method of singulating aplurality of die included in a substrate includes removing the masklayer 24 covering the die streets 8, as illustrated by FIG. 8 . Themethod may include removing the mask layer 24 through etching, plasmaashing, or solvent stripping. The seed layer 14 may prevent damage tothe substrate 2 during removal of the mask layer 24. Upon removing themask layer 24, the portion 28 of the seed layer 14 in the die street 8may be exposed.

Referring to FIG. 10 , a view of the substrate of FIG. 9 singulated intoa plurality of die is illustrated. The method of singulating a pluralityof die 30 in the substrate 2 includes removing substrate material in thedie street 8 and removing a seed layer material in the die street. Invarious implementations, each die of the plurality of die may have aperimeter which is a quadrilateral or a triangular shape (or a closedpolygonal shape), depending on the pattern of the mask layer (and inturn, depending on the location of the die street) applied over the seedlayer, as previously disclosed herein.

In various implementations, the substrate material in the die street 8and the seed layer material in the die street may be removed usingeither a laser beam or a saw blade. In such implementations, the seedlayer material in the die street 8 may be simultaneously removed withthe substrate material in the die street as the laser ablation or sawingused to clear the seed metal material from the die street may also clearthe substrate material from the die street. In implementations using alaser beam or saw blade to singulate the plurality of die 30, the laserbeam or saw blade may result in roughened sidewalls 32 of the die street8 or roughened sidewalls of the plurality of die 30. In suchimplementations, the method of singulating a plurality of die 30 fromthe substrate may include remote plasma healing a sidewall of each die(or sidewall 32 of the die street 8) of the plurality of die 30.Referring to FIG. 11 a view of the plurality of die of FIG. 10 havingsmoothed sidewalls is illustrated. In various implementations, themethod of singulating the plurality of die 30 may include removingdamage from a sidewall 32 of the die street 8 through remote plasmahealing. In such implementations, an isotropic plasma etch may beapplied to the sidewalls 30 of the die street 8. The plasma maypenetrate/facilitate reaction with the materials of the cracks and/orchips of the sidewalls 32 formed when the plurality of die 30 weresingulated from the substrate 2. As the plasma enters the cracks and/orchips, the damaged portion of the substrate 2 may etch away and resultin smoothed, or healed, sidewalls 32 of the die street 8, as illustratedby FIG. 11 .

In the various implementations disclosed herein, by removing thebackside metal layer in the die street, the risk of re-deposition of thebackside metal material along the sidewalls of each die of the pluralityof die is reduced. Though the seed metal layer may be removed at thesame time the substrate material is removed from the die street, and inturn, the plurality of die are singulated, because the seed metal layeris extremely thin as compared to the thickness of the backside metallayer the risk of re-deposition is still reduced. Further, becausevarious implementations disclosed herein include methods of singulatinga plurality of die from a second side, or backside of the substrate,there is no need to flip the substrate over in order to singulate thesubstrate from the first side, or side having the plurality of dieformed thereon. The ability to singulate the die from the backside mayreduce damage to the substrate, and especially a thinned substrate, asit requires the substrate to be handled less. This may in turn cause theyield from the process to be increased correspondingly.

Referring to FIG. 12 , a view of the substrate of FIG. 9 in a flippedorientation and with substrate material in the die street removed isillustrated. In another implementation, rather than singulating theplurality of die as illustrated by FIG. 10 , the method of singulating aplurality of die may include flipping the substrate 180 degrees andremoving the substrate material in the die street 8. In variousimplementations, the substrate material may be removed through plasmaetching. In various implementations, a plasma etch process marketedunder the tradename BOSCH® by Robert Bosch GmbH, Stuttgart Germany (the“Bosch process”), may be used to remove the substrate material in thedie street 8. In other implementations, other plasma etch processes maybe used to remove the substrate material in the die street 8. In suchimplementations, because plasma etching can remove a narrow amount ofsubstrate material, the width of the substrate material removed may beless than a width of the die street. In other implementations, the widthof the substrate material removed may be the same as the width of thedie street. Referring to FIG. 13 , a view of the substrate of FIG. 12singulated into a plurality of die is illustrated. In variousimplementations, the method of singulating a plurality of die 34 mayinclude jet ablating the seed metal material in the die street 8. In theimplementation illustrated by FIGS. 12-13 , by removing the backsidemetal layer in the die street and by removing the substrate material inthe die street through plasma etching prior to removing the seed layermaterial in the die street 8, the risk of re-deposition of the backsidemetal material along the sidewalls of each die of the plurality of diemay be removed.

In places where the description above refers to particularimplementations of die singulation systems and methods and implementingcomponents, sub-components, methods and sub-methods, it should bereadily apparent that a number of modifications may be made withoutdeparting from the spirit thereof and that these implementations,implementing components, sub-components, methods and sub-methods may beapplied to other die singulation systems and methods.

What is claimed is:
 1. A method of singulating a plurality of die comprised in a substrate, the method comprising: forming a plurality of die on a first side of a substrate; using a shadow mask, applying a mask layer over the second side of the substrate; forming a backside metal layer over the second side of the substrate; removing the mask layer; flipping the substrate; and singulating the plurality of die comprised in the substrate through removing substrate material in a die street from the first side of the substrate.
 2. The method of claim 1, wherein the mask layer comprises a polymer material.
 3. The method of claim 1, wherein the mask layer comprises a photoresist material.
 4. The method of claim 1, wherein the backside metal layer comprises copper.
 5. The method of claim 1, wherein removing substrate material in the die street further comprises plasma etching.
 6. The method of claim 1, further comprising forming a seed layer over the second side of the substrate.
 7. The method of claim 1, further comprising thinning the second side of the substrate to a thickness less than 30 micrometers.
 8. The method of claim 1, further comprising aligning the substrate from a backside of the substrate.
 9. A method of singulating a plurality of die comprised in a substrate, the method comprising: forming a plurality of die on a first side of a substrate; forming a seed layer over the second side of the substrate; applying a mask layer over the second side of the substrate; forming a backside metal layer over the second side of the substrate; removing the mask layer; flipping the substrate; removing substrate material in a die street; and removing seed layer material in the die street after removing the substrate material.
 10. The method of claim 9, wherein the mask layer is applied using a shadow mask.
 11. The method of claim 9, wherein the mask layer comprises a photoresist material.
 12. The method of claim 9, wherein removing substrate material in the die street comprises plasma etching the substrate.
 13. The method of claim 9, further comprising thinning the second side of the substrate to a thickness less than 30 micrometers.
 14. The method of claim 9, further comprising aligning the substrate from a backside of the substrate.
 15. A method of singulating a plurality of die comprised in a substrate, the method comprising: forming a plurality of die on a first side of a substrate; forming a seed layer over the second side of the substrate; applying a mask layer over the second side of the substrate; forming a backside metal layer over the second side of the substrate; removing the mask layer; flipping the substrate; etching the substrate from the first side of the substrate in a die street; and singulating the plurality of die through jet ablating the seed layer in the die street after etching the substrate.
 16. The method of claim 15, wherein the mask layer comprises a photoresist material.
 17. The method of claim 15, further comprising thinning the substrate.
 18. The method of claim 15, wherein the backside metal layer is 10 micrometers thick.
 19. The method of claim 15, wherein the mask layer comprises a resin.
 20. The method of claim 15, wherein etching the substrate forms a channel having a width less than a width of the die street. 